| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device capable of highly accurately positioning an object to be positioned without causing a position deviation, and suppressing the time required for this positioning process. SOLUTION: The positioning device is provided with an observing means for detecting the position of a mask, plural driving means for driving a stage for holding the mask and a controller for controlling these driving means. Concerning this positioning device, in a step S1, the position deviation of the mask is calculated based on the position of the mask detected by the observing means. In a step S2, a second prescribed displacement to be a first prescribed displacement is calculated so that the time difference of driving end timing for each driving means is settled within 0.15 sec concerning the distance from the mask, namely, from the target position of the stage. In a step S3, the respective driving means are respective driven based on the second prescribed displacement. In a step S4, the stop of the stage is waited. In a step S5, the respective driving means are respectively driven based on the first prescribed displacement.
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