| 摘要 |
PURPOSE:To prevent the warp of a table so as to attain precise displacement by making the dimension of parallel deflection beam displacement devices in a displacement direction almost equal to the dimension of a table more than the dimension of a member for displacement. CONSTITUTION:The dimension in the direction of an X-axis can considerably be increased without altering the dimension of the parallel beam in the direction of an Y-axis in displacement devices 22Fxa and 22Fxb including overhang parts 22a and 22b to which the table is fixed. Similarly, the dimension in the direction of the Y-axis can considerably be increased without altering the dimension in the direction of the X-axis in the parallel warp beam displacement devices 23Fya and 23Fyb including overhang parts 23a and 23b. Even if the dimension of the connection parts 25a and 25b connecting the table are considerably increased and the member for displacement, becomes large, the table mounting the member can be constituted in such a way that it will not considerably protrude from the connection parts 25a and 25b in the direction of the X-axis. Thus, the deflection of the table and furthermore, the warp of the member for displacement can be prevented. |
