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发明名称
A WAFER CARRIER HAVING A LOW TOLERANCE BUILD-UP
摘要
申请公布号
EP1097091(A2)
申请公布日期
2001.05.09
申请号
EP19990935472
申请日期
1999.07.09
申请人
FLUOROWARE, INC.
发明人
BORES, GREGORY, W.;ZABKA, MICHAEL, C.
分类号
B65D85/86;H01L21/673;(IPC1-7):B65D85/00;H01L21/00
主分类号
B65D85/86
代理机构
代理人
主权项
地址
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