DRY ETCHING DEVICE,申请号JP19850168846-传众专利搜索

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法人/股东/高管

发明名称	DRY ETCHING DEVICE
摘要
申请公布号	JPS6230328(A)	申请公布日期	1987.02.09
申请号	JP19850168846	申请日期	1985.07.31
申请人	NEC CORP	发明人	NAKAMURA SHINICHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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