SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER, PROCESS FOR PRODUCING THE SAME, AND METHOD OF USING THE SAME
摘要
<p>A process for producing a synthetic quartz glass for optical members, which comprises the step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet having a wavelength of 180 nm or shorter to improve the transmittance in a region of wavelengths not longer than 165 nm.</p>
