| 摘要 |
PROBLEM TO BE SOLVED: To control the posture of a sample on a sample holder so that the sample is in the same state as when it is originally placed on a sample substrate. SOLUTION: In a chamber of a charged particle beam device, the sample on the sample substrate is held and conveyed to the sample holder, and the posture of the sample is controlled when the sample is fixed on the sample holder. A method for transferring the sample in the charged particle beam device comprises: a marking process for applying a marking to the surface of the sample Wb located on the sample substrate by a beam in the chamber; a conveying process for holding the sample by a sample holding means 7 and conveying it from the sample substrate to the sample holder; and a posture control process for controlling the posture of the sample while observing markings Ma, Mb applied to the surface of the sample when the sample is fixed on the sample holder. COPYRIGHT: (C)2008,JPO&INPIT
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