MANUFACTURING METHOD OF OPTICAL PATH REGULATING APPARATUS

摘要

depositing a first sacrificial film on a driving substrate where transistors are built in and which has contact terminals on its surface; forming first and second grooves by patterning the first sacrificial film, and forming first and second supporters in the grooves; forming an elastic part on top of the first sacrificial film and the supporters, and forming third grooves revealing the contact terminals; forming a plug in the third grooves and forming a signal electrode; forming a transformation part and a bias electrode on top of the signal electrode, and forming forth grooves revealing the first sacrificial film; forming a second sacrificial film contacted with the first sacrificial film on top of the bias electrode; forming fifth grooves by patterning the second sacrificial film and forming third supporters in the fifth grooves; forming a mirror on top of the second sacrificial film and the third supporters; removing the region between the first grooves of an actuator adjacent to the second grooves in order to reveal the first sacrificial film; and removing the sacrificial films.