发明名称 OPTICAL FIBER PACKAGING STRUCTURE AND ITS PRODUCTION
摘要 PROBLEM TO BE SOLVED: To easily couple optical fibers and optical elements with high accuracy and high reliability without a power monitor. SOLUTION: V-grooves 2 are formed on a silicon substrate 1 and the optical fibers are arranged respectively in these grooves 2. A cover 12 is put thereon from above. Electrodes 4 for solder bumps 13 are formed on the substrate 1 and the cover 12 at the position where the both face each other. Both are fixed by solder, by which the optical fibers are fixed. On the other hand, the substrate or cover is previously formed with marks 7 for positioning in the longitudinal direction of the optical fibers on the front ends of the optical fibers. The optical fibers are positioned with these marks as reference. On the other hand, the optical elements 11 are fixed by the solder bumps 13 near to the front ends of the optical fibers 10. Marks 8 for measuring the packaging positions of the optical elements 11 may be previously formed on the substrate 1 as well.
申请公布号 JPH09138325(A) 申请公布日期 1997.05.27
申请号 JP19950293867 申请日期 1995.11.13
申请人 NEC CORP 发明人 YONEDA ISAO;SASAKI JUNICHI;ITO MASATAKA;HONMO HIROSHI
分类号 G02B6/42;H01L31/0232;H01L33/60;H01L33/62 主分类号 G02B6/42
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