发明名称 Method for forming barrier structures on a substrate and the resulting article
摘要 A method for chemically etching of a foam glass layer to provide at least one cavity pattern in the foam glass layer. The method utilizes a substrate with at least one major surface suitable for receiving a glass layer. At least one layer of a glass paste composition in then applied onto the major surface of the substrate. The substrate and glass paste composition are then heated to a temperature sufficient enough to obtain a foam glass layer bonded to the major surface of the substrate. At least a portion of the foam glass layer is chemically etched to obtain at least one cavity pattern in the foam glass layer. The chemical etching of the foam glass layer results in an anisotropic etching rate.
申请公布号 AU6986801(A) 申请公布日期 2002.01.02
申请号 AU20010069868 申请日期 2001.06.15
申请人 PHOTONICS SYSTEMS, INC. 发明人 PAUL R. ANDERSON;CHARLES J. BARNHART;RANDALL J. CUTCHER;JILL M. WYSE
分类号 B32B5/18;B32B17/06;B81C1/00;C03B19/08;C03C8/10;C03C15/00;C03C17/04;H01J9/02;H01J9/24;H01J11/36;H01J31/12 主分类号 B32B5/18
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