发明名称 CONTROLLED DIELECTRIC LOSS ALUMINUM NITRIDE
摘要 <p>A controlled dielectric loss, sintered aluminum nitride body having a density of greater than about 95 % theoretical, a thermal conductivity of greater than about 100 W/m-K, and a dissipation factor measured at room temperature at about 1 KHz selected from: (a) less than or equal to about 0.001; and (b) greater than or equal to about 0.01. A process for producing a controlled dielectric loss, sintered aluminum nitride body, comprising heat treating an aluminum nitride body at sintering temperatures, including providing a heat treatment atmosphere which effects a selected nitrogen vacancy population in the aluminum nitride body at the sintering temperatures, and cooling the aluminum nitride body from sintering temperatures at a controlled rate and in a cooling atmosphere effective to control the selected nitrogen vacancy population.</p>
申请公布号 WO1997035816(A1) 申请公布日期 1997.10.02
申请号 US1997004785 申请日期 1997.03.26
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