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发明名称
CVD processing chamber
摘要
申请公布号
EP0714998(A3)
申请公布日期
1996.12.04
申请号
EP19950117865
申请日期
1995.11.13
申请人
APPLIED MATERIALS, INC.
发明人
ZHAO, JUN;CHO, TOM;DORNFEST, CHARLES;WOLFF, STEFAN;FAIRBAIRN, KEVIN;GUO, XIN SHENG;SCHREIBER, ALEX;WHITE, JOHN M.
分类号
C23C16/44;C23C16/455;C23C16/458;C23C16/46;C30B25/02;H01J37/32;H01L21/205;H01L21/687;(IPC1-7):C23C16/44;H01L21/00
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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