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发明名称
METHOD AND APPARTUS FOR MANUFACTURING TIN FILM
摘要
申请公布号
JPH11204458(A)
申请公布日期
1999.07.30
申请号
JP19980005234
申请日期
1998.01.14
申请人
OKI ELECTRIC IND CO LTD
发明人
MORI HIROTAKA
分类号
C23C14/06;C23C14/34;H01L21/28;H01L21/285;(IPC1-7):H01L21/285
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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