CORROSION-RESISTANT MEMBER AND ELECTROSTATIC CHUCK DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a corrosion-resistant member with a high dielectric constant and high mechanical strength, and an electrostatic chuck device including the corrosion-resistant member.SOLUTION: A corrosion-resistant member 1 containing ReAlO(Re is rare earth element) and AlOcontains multiple crystal grains 2 and multiple secondary phases 4 existing in a triple point of grain boundary 3 between the neighboring crystal grains 2. The ratio of the AlOin the secondary phase 4 is higher than the ratio of the AlOin the crystal grain 2. An electrostatic chuck device includes the corrosion-resistant member.SELECTED DRAWING: Figure 1