| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To always stably laminate materials to be laminated irrespective of the existence of dust and internal stress with respect to a method for laminating the materials in which the materials are bonded together and laminated and a lamination apparatus. <P>SOLUTION: In the method for laminating the materials, a resin 16 to be laminated formed on a first substrate 20 and a second substrate 30A are laminated and joined to each other. By ejecting a pressurized fluid from an ejection hole 66B while the periphery 30b of the second substrate 30A is attracted to a channel for attraction 62B, the second substrate 30A is forcibly deformed to be convex toward the first substrate 20. In this state, the first substrate 20 (resin 16) is joined to the second substrate 30A. Even when the second substrate 30A is warped or inclined, the warpage and the inclination are eliminated by deforming the second substrate forcibly, so that the substrates 20 and 30A can surely be joined together. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
