INTEGRATED REAL-TIME MANAGEMENT METHOD FOR SEMICONDUCTOR MANUFACTURING PROCESS AND YIELD ANALYSIS

摘要

PROBLEM TO BE SOLVED: To provide an integrated real-time management method of semiconductor process and yield analysis for solving various problems of conventional technologies.

SOLUTION: The integrated real-time management method of semiconductor manufacturing process and yield analysis comprises inspecting a plurality of semiconductor products with a plurality of items to record a plurality of inspecting results during semiconductor manufacturing process, classifying the semiconductor products into a plurality of groups with a default rule to generate initial data and record the initial data and related groups in a database, indexing a plurality of semiconductor product groups and the initial data of the respective semiconductor product groups from the database by a default product rule and parameter to calculate a corresponding analysis result based upon the indexed semiconductor product groups and initial data by an analysis module, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.

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