发明名称 |
P-TYPE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR OF SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
<p>A PMOS transistor of a semiconductor device and a fabricating method thereof are provided to minimize a leakage current happening at edges between a channel region, a gate electrode, and a gate insulating layer. A gate insulating layer having a first transmission preventing barrier(115) is formed on a semiconductor substrate, and then a gate conductive layer is formed on the gate insulating layer. The gate conductive layer and the gate insulating layer are patterned to form a gate electrode and a gate insulating pattern(114a). An offset spacer(118) is formed on both sides of the gate electrode and the gate insulating layer pattern, in which the offset spacer has a second transmission preventing barrier(215).</p> |
申请公布号 |
KR20070105002(A) |
申请公布日期 |
2007.10.30 |
申请号 |
KR20060036704 |
申请日期 |
2006.04.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
AHN, JONG HYON;YOUN, KI SEOG;ROH, KWAN JONG |
分类号 |
H01L29/78;H01L21/334 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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