| 摘要 |
A plasma sterilization apparatus comprises a sterilization chamber (10), a plasma generation chamber (20), a vacuum pump, a high frequency power source, and an injection heater. A plasma sterilization apparatus comprises a sterilization chamber for receiving an article to be sterilized; a plasma generation chamber located at a separate position from the sterilization chamber, which communicated with the sterilization chamber and has two electrodes; a vacuum pump connected to the sterilization chamber, which is capable of extracting air from the chambers to form a vacuum state in both the sterilization chamber ad the plasma generation chamber; a high frequency power source connected to a cathode of the plasma generation chamber through both an impedance matching controller and an impedance matching circuit; and an injection heater that communicates with the plasma generation chamber to evaporate microbiocidal agents for the generation of plasma and the injection of the evaporated product into the plasma generation chamber. |
