VISION SYSTEM AND METHOD FOR CALIBRATING A WAFER CARRYING ROBOT
摘要
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
申请公布号
WO2004082014(A1)
申请公布日期
2004.09.23
申请号
WO2004US07202
申请日期
2004.03.09
申请人
APPLIED MATERIALS, INC.;SADIGHI, IRAJ;HUDGENS, JEFF;RICE, MICHAEL;WYKA, GARY
发明人
SADIGHI, IRAJ;HUDGENS, JEFF;RICE, MICHAEL;WYKA, GARY