| 摘要 |
PURPOSE:To enable a large area and crystal region with aligned orientation to be formed by placing a nucleus-forming surface consisting of an amorphous material which is artificially given a surface anisotropy on an amorphous substrate, determining the crystal orientation at the initial stage of occurrence of nucleus, and then achieving crystal growth while maintaining the crystal structure. CONSTITUTION:A non-single crystal substance 1 with a higher nucleus-forming density than an unsingle crystal substrate 2 is coated on the non-single crystal substance 2 and then a regular step 3 is artificially formed on the surface. After that, a thin film 1 with a high nucleus-forming density is subjected to fine patterning for forming a nucleus-forming surface 4. Then, a nucleus 5 of an accumulated substance apparatus on the nucleus-forming surface 4 and a single crystal grows on each nucleus-forming surface 4 through initial complex separation, adsorption, coalescence, and coarse phenomenon, and then no accumulation is made on the surface of other low nucleus- forming substances 2. Also, with the orientation of the formed crystal, the orientation in the substrate normal direction as well as within the surface is aligned to be the same. Crystal growth is performed while maintaining the crystal structure. Thus, a large area and crystal region with aligned orientation can be formed. |
