IMPROVED REACTION CHAMBERS AND METHODS FOR CVD.,申请号EP19880906445-传众专利搜索

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发明名称	IMPROVED REACTION CHAMBERS AND METHODS FOR CVD.
摘要
申请公布号	EP0368900(A4)	申请公布日期	1989.10.16
申请号	EP19880906445	申请日期	1988.06.17
申请人	EPSILON TECHNOLOGY, INC.	发明人	OZIAS, ALBERT E.
分类号	C23C16/44;C23C16/455;C30B25/02;C30B25/10;H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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