| 摘要 |
<p>PURPOSE:To manufacture an X-ray mask of high contrast having an X-ray transmission pattern in a broad X-ray absorber part by a method wherein a bonding agent held by X-ray absorbers between is made the X-ray transmission pattern. CONSTITUTION:Blocks 1 and 2 of an X-ray absorber of which the main constituent is a metal or an alloy thereof having a surface flattened by grinding or the like are prepared and the surfaces of the blocks 1 and 2 of the X-ray absorber are stuck on each other by a bonding agent 3 constituted of epoxy resin. Since the thickness of the bonding agent 3 becomes a line width of an X-ray transmission line pattern, in this X-ray mask, the thickness of the bonding agent 3 is controlled to be a prescribed one. Although the control depends on the discrete characteristics of the bonding agent 3, the thickness can be controlled to be an arbitrary one by regulating a pressing force at the time of bonding, as to the same sort of bonding agent 3. After the bonding, the whole of the bonded blocks is sliced, as shown by broken lines, so that the section of the bonding agent 3 is exposed. Thereby an X-ray mask is obtained.</p> |
