| 发明名称 |
Surface treatment agent for fine surface treatment. |
| 摘要 |
<p>A surface treatment agent for fine surface treatment comprising a mixed solution of hydrogen fluoride, solution of ammonium fluoride and water, the mixed solution containing less than 0.01 to 8 weight % of hydrogen fluoride (HF) and less than 0.01 to 15 weight % of ammonium fluoride (NH4F).</p> |
| 申请公布号 |
EP0405886(A2) |
申请公布日期 |
1991.01.02 |
| 申请号 |
EP19900306927 |
申请日期 |
1990.06.25 |
| 申请人 |
HASHIMOTO CHEMICAL INDUSTRIES CO., LTD. |
发明人 |
OHMI, TADAHIRO;MIKI, MASAHIRO;KIKUYAMA, HIROHISA |
| 分类号 |
C09K13/08;H01L21/306;H01L21/3105 |
主分类号 |
C09K13/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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