发明名称 Apparatus and a method and a system for treating a surface with at least one gliding arc source
摘要 The invention relates to an apparatus for treating a surface with a at least one gliding arc source comprising at least one gas flow controlling unit (104); and a set of electrodes (102); wherein the at least one gas flow controlling unit (104) and the set of electrodes (102) are controlled to provide a plasma comprising a gas temperature at the set of electrodes (102) above approximately 2000 K. In this way, an optimal or substantially optimal plasma for treating surfaces of samples is achieved.
申请公布号 US9420680(B2) 申请公布日期 2016.08.16
申请号 US201013516156 申请日期 2010.12.14
申请人 Danmarks Tekniske Universitet 发明人 Kusano Yukihiro
分类号 B23K10/00;H05H1/48 主分类号 B23K10/00
代理机构 Polsinelli PC 代理人 Polsinelli PC ;Galant Ron
主权项 1. An apparatus for treating a surface, comprising at least one gliding arc source comprising at least one gas flow controlling unit 104 and a set of elongated electrodes 102 for providing a plasma; a cooling unit for providing a cooling fluid; and a high voltage power supply for generating a discharge; wherein at least one of the electrodes comprises a tubular portion having a first end and a second end, fluidly coupled to the cooling unit 201, wherein the tubular portion defines a longitudinal direction of the electrode, wherein the tubular portion is configured to receive, during operation, the cooling fluid at said first end and discharge the cooling fluid at said second end, wherein the centre of the cross-section of the tube at the first end is displaced relative to the centre of the cross-section of the tube at the second end, wherein the electrode further comprises an outer surface comprising a portion facing the other one of the electrodes, said portion of the outer surface being curved in a plane normal to said longitudinal direction and having a radius of curvature less than 3 mm, wherein the apparatus further comprises a control unit 103 adapted to control at least the cooling unit, and wherein the apparatus further comprises a computational unit communicatively coupled to the control unit and to a sensor, wherein said sensor is adapted to measure a parameter indicative of the resistance of at least one of the electrodes, and where the computational unit is adapted to calculate a feedback signal based on the measured parameter; and wherein the control unit is adapted to control the cooling unit responsive to the calculated feedback signal.
地址 Kgs. Lyngby DK