| 摘要 |
PROBLEM TO BE SOLVED: To adjust astigmatism rapidly with a simple algorithm by utilizing the auto focus evaluation value of an image acquired from a pattern formed in a sample. SOLUTION: The electron beam equipment observes and evaluates the sample by applying electron beams to the sample W, and detecting secondary electrons, such as electrons, reflection electrons, and backscattering electrons, radiated from the sample. The electron beam equipment has an astigmatism adjustment means 17 for adjusting the astigmatism of electron beams and gives a correction voltage for maximizing the focus evaluation value obtained from the image of a pattern formed in the sample W to the astigmatism adjustment means 17. The astigmatism adjustment means 17 is a multi-pole having a plurality of pairs of electrodes or coils that oppose with the light axis of electron beams as a center. COPYRIGHT: (C)2008,JPO&INPIT
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