摘要 |
PROBLEM TO BE SOLVED: To obtain an inspection apparatus whose inspection efficiency and inspection accuracy are enhanced by a method wherein a sensor is moved in the circumferential direction in such a way that it is moved at a low speed near its bonding part to an impeller and that it is moved at a high speed in a part at a distance from the bonding part. SOLUTION: An ultrasonic beam is impinged, via a sensor 3, on an impeller, to be measured, which is mounted on a positioner 1 which is installed in a water tank 2, and the impeller is inspected. At this time, the relative position of the impeller, to be measured, to the sensor 3 is controlled by an arm 4 at a robot. The sensor 3 is moved at a low speed near its bonding part, to the impeller, in which a stress is high and in which a defect is easy to generate, and a sampling density is increased. The sensor is moved at a high speed in a part, at a distance from the bonding part, in which a stress is low and in which a defect is hard to generate, and a sampling density is lowered. A detected echo signal is changed into a digital signal by an analyzer 5, and the detect of the impeller to be measured is inspected. |