| 摘要 |
A vacuum pump device such as a turbo molecular pump capable of preventing heat from transmitting from the surface to the inside of its internal members such as the blades of a rotor vane or a stator vane, wherein a first layer (13) formed of a poor thermal conductor film is formed on the blades (12) of the rotor vane (62) or stator vane (72) of the turbo molecular pump device (1) exposed to pump compression heat or heat emitted from a heater and a second layer (14) formed of a good thermal conductor film is formed on the surface of the first layer (13), the double layer structure film preventing a transmission of heat from the second layer (14) to the blades (12), whereby the surfaces of the blades (12) of the rotor vane (62) and stator vane (72) are not cooled and semiconductor products which tends to deposit or accumulate on the surfaces of the vanes are sublimated smoothly. |
