FABRICATION OF REINFORCED NANOPOROUS MEMBRANES

摘要

The present invention disclose a method for manufacturing ultra-thin reinforced membranes from a SOI wafer having a front side and a back side, the front side having a etch stop layer buried under a device layer, provided for by forming reinforcement bars by etching openings in the device layer down to the etch stop layer, filling the openings at least partially by deposition of a first filler, and then polishing the top surface to the silicon surface before depositing a membrane material.