发明名称 |
DEFECT INSPECTION UNIT, RADIATION DETECTOR, AND DEFECT INSPECTION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection unit, a radiation detector and a defect inspection method capable of detecting a defect pixel due to break of a wiring.SOLUTION: An X-ray detector 1 has a defect inspection unit 100 which acquires plural dark images corresponding to different detection times (imaging time) in a state that X-ray is not irradiated, and calculates differences among pixel images in plural dark images. As for an area where the calculated difference in pixel images is smaller than a predetermined value, the defect inspection unit 100 determines that a defect pixel due to a wiring break is included, and transmits a piece of information relevant to the position of the defect pixel to a storage 44a.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016134776(A) |
申请公布日期 |
2016.07.25 |
申请号 |
JP20150008414 |
申请日期 |
2015.01.20 |
申请人 |
TOSHIBA CORP;TOSHIBA ELECTRON TUBES & DEVICES CO LTD |
发明人 |
TAKI NAOTERU |
分类号 |
H04N5/367;G01T1/20;H01L27/14;H01L27/144;H01L27/146 |
主分类号 |
H04N5/367 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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