| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a quantum dot type functional structure body, where micro particles are diffused homogeneously in a transparent medium by efficiently manufacturing high-purity micro particles of uniform particle size and structure, and depositing them together with the transparent medium on a substrate. SOLUTION: A manufacturing device for a quantum dot type functional structure body, comprising a carrier gas exhaust system is provided which comprises a micro particle generating chamber 101, where a semiconductor target is excited with a pulse laser beam 109 in a low-pressure rare gas atmosphere for desorption/injection of it through abrasion reaction, which is condensed and grown in the air to generate high- purity semiconductor micro particles, a micro particle classifying chamber 102 where the micro particles are classified, and a deposition chamber 103, where correction of the high-purity semiconductor micro particles and excitation of the transparent medium target with an excimer laser beam are performed alternately or at the same time, and the material generated through the abrasion reaction is corrected on the substrate, so that the transparent medium and the high-purity semiconductor micro particles are deposited. |
