| 摘要 |
<p>This invention provides a laser marking apparatus which can make marking at a high scanning speed, can effectively utilize laser power and has high marking accuracy. In the laser marking apparatus, the laser beam from a laser beam source is directed to the surface of an object through a laser scanning system comprising an x-direction polarizing mirror, a Y-direction polarizing mirror, a field lens, a mask, etc. A double polarizing prism (13) comprising a pair of polarizing prisms (13a, 13b) for branching the incident laser beam (1) into twin laser beams is disposed in series between the polarizing mirror (3), which is disposed on the upstream side among the x- and y-direction polarizing mirrors (3, 8), and the laser beam source (2), and the distance between the pair of polarizing prisms (13a, 13b) is made variable. The pair of polarizing prisms (13a, 13b) may be rotated either simultaneously or individually. <IMAGE></p> |
