发明名称 Solid-state image pick-up unit and method of manufacturing the same
摘要 A solid-state image pick-up unit comprises: a semiconductor substrate comprising an area in which a photoelectric converting portion is formed; and an electric charge transfer portion that transfers an electric charge formed by the photoelectric converting portion, wherein the electric charge transfer portion comprises: an electric charge transfer electrode including a first layer electrode and a second layer electrode; and a gate oxide film, the gate oxide film comprises a second gate oxide film formed under the second layer electrode, the second gate oxide film comprising an ONO film which comprises a SiO film, a SiN film and a SiO film in this order, and the second gate oxide film is continuously formed to cover whole of a region between the first layer electrode and the second layer electrode and a region under the second layer electrode.
申请公布号 US2006220068(A1) 申请公布日期 2006.10.05
申请号 US20060374017 申请日期 2006.03.14
申请人 FUJI PHOTO FILM CO., LTD 发明人 HOMMA RYOICHI
分类号 H01L27/148 主分类号 H01L27/148
代理机构 代理人
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