METHOD FOR FABRICATING FLOATING MICROSTRUCTURE AND ASSEMBLY FOR PROCESSING FLOATING MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To fabricate a floating microstructure while keeping the gap and arrangement thereof by forming a plurality of floating microstructure assemblies on a temporary substrate and them removing the temporary substrate and bonding medium. SOLUTION: A first microstructure is fabricated on the surface of a temporary substrate and first microstructure assembly is formed and then a second microstructure is fabricated thereon and a second microstructure assembly is formed. First and second microstructure assemblies are then coupled to face each other while being separated and arranged and they are bonded by introducing a bonding medium between them. Subsequently, the temporary substrate and bonding medium are removed and the microstructure assemblies are secured while being separated and arranged. Bonding medium may be introduced between the microstructures by injecting an organic bonding medium. In that case, oxygen plasma dry etching is employed in the process for removing the bonding medium.