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发明名称
PLASMA ETCHING PROCESS AND APPARATUS THEREOF
摘要
申请公布号
JPH0371631(A)
申请公布日期
1991.03.27
申请号
JP19890207272
申请日期
1989.08.10
申请人
FUJITSU LTD
发明人
TANIMOTO YOSHIAKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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