METHOD OF MAKING GRATING STRUCTURES HAVING HIGH ASPECT RATIO,申请号EP20040734257-传众专利搜索

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发明名称	METHOD OF MAKING GRATING STRUCTURES HAVING HIGH ASPECT RATIO
摘要
申请公布号	EP1747485(A1)	申请公布日期	2007.01.31
申请号	EP20040734257	申请日期	2004.05.21
申请人	PIRELLI & C. S.P.A.	发明人	DONEDA, SERGIO;MORSON, ROMANO;SARDO, STEFANO
分类号	G02B5/18;G02B6/12;G02B6/124;G02B6/34	主分类号	G02B5/18
代理机构		代理人
主权项
地址

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