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发明名称
APPARATUS FOR HEAT-TREATING COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0585900(A)
申请公布日期
1993.04.06
申请号
JP19910218842
申请日期
1991.08.29
申请人
MITSUBISHI MATERIALS CORP
发明人
UMEHARA MIZUHIRO;HAIJIMA KAZUO
分类号
C30B29/42;C30B33/02
主分类号
C30B29/42
代理机构
代理人
主权项
地址
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