发明名称 |
MICROFORCE MEASURING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a microforce measuring apparatus which changes little in sensitivity and zero point. SOLUTION: A cantilevered microforce measuring apparatus includes: a cantilever 11 serving as a straining element; a strain sensor 12 integrally formed between the fixed point of the cantilever 11 and a measuring point for a measurement force F at the same time that the cantilever 11 is formed, for detecting the strain of the cantilever 11 and converting it into an electric signal; and a stress concentrating part 13 provided at the part of the cantilever 11 where the strain sensor 12 is placed to allow stresses on the cantilever 11 to concentrate thereon. |
申请公布号 |
JPH11153498(A) |
申请公布日期 |
1999.06.08 |
申请号 |
JP19970321148 |
申请日期 |
1997.11.21 |
申请人 |
YOKOGAWA ELECTRIC CORP |
发明人 |
ONOE YASUSHI;TANATSUNA TAKEO |
分类号 |
G01L1/22;B81C99/00;G01D3/028;G01L5/00 |
主分类号 |
G01L1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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