发明名称 METHOD FOR RE-REGISTERING AN OBJECT TO BE ALIGNED AND STORAGE MEDIUM STORING A PROGRAM FOR EXECUTING THE METHOD
摘要 A method for re-registering at least one set of image information of an object to be aligned to align the object by an imaging unit, the image information including photographing conditions and position data of the object which have been previously registered by capturing an image of the object with the imaging unit. The method includes automatically moving at least one of the object and the imaging unit based on the position data of the image information and re-capture the image of the object with the imaging unit by using the previously registered photographing conditions of the image information and re-registering the image information by using the re-captured image of the object.
申请公布号 US2008068033(A1) 申请公布日期 2008.03.20
申请号 US20070857912 申请日期 2007.09.19
申请人 TOKYO ELECTRON LIMITED 发明人 KAGAMI FUMITO
分类号 G01R31/00 主分类号 G01R31/00
代理机构 代理人
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