发明名称 MASK AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR BY USING MASK
摘要 A mask and method for manufacturing a thin film transistor of a pixel region of an array substrate by using the mask. The mask (20) comprises a mask body (21) having a pattern region (22). The pattern region (22) comprises: a photoresist partial removal region (221) for removing a part of photoresist; a photoresist complete removal region (223) for removing all of the photoresist; and a first photoresist retaining region (222) provided between and contiguous with the photoresist partial removal region (221) and the photoresist complete removal region (223) to retain the photoresist. The first photoresist retaining region (222) is used to adjust and improve an appearance of a photoresist portion corresponding to the photoresist partial removal region (221) after exposure and developing.
申请公布号 WO2016145814(A1) 申请公布日期 2016.09.22
申请号 WO2015CN90252 申请日期 2015.09.22
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 LIU, Xiang
分类号 H01L21/77;G03F1/00 主分类号 H01L21/77
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