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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0372652(A)
申请公布日期
1991.03.27
申请号
JP19900201275
申请日期
1990.07.31
申请人
TOSHIBA CORP
发明人
SHIBATA SUNAO;KUROSAWA AKIRA
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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