| 摘要 |
<p>PURPOSE: To reduce time required for removal and re-assembly by providing substrate supporting pedestals installed on a processing surface so that they can be removed, a cover assembly installed on the processing surface so that it can be removed for protecting the surface from the effect of reaction gas atmosphere. CONSTITUTION: For the assembly of a process kit, a six polar body cover 84 is screwed by a six polar body 22 at first. Then, eighteen pedestals 34 are pressed on the six polar body 22 by alignment pins and they are screwed in the diameter parts of the pedestals 34. Pedestal rings are fastened by a snap system on the pedestals 34. For cleaning or rearranging parts, the screwing of the six polar body cover 84 is released and respective half bodies are pulled out from beneath the pedestals 34. The pedestals 34 can be wiped by arranging them on the six polar body 22 as they are. Since the pedestals 34 are not removed, it is not necessary to align again a robot.</p> |
