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发明名称
摘要
申请公布号
JP4419383(B2)
申请公布日期
2010.02.24
申请号
JP20020345355
申请日期
2002.11.28
申请人
发明人
分类号
H01L21/336;H01L21/76;H01L29/786;H01L51/00;H01L51/05;H01L51/40
主分类号
H01L21/336
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