DATA PROCESSOR AND DATA PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a data processor and a data processing method for carrying out the display of feature quantities wherein the classification of defects extracted by a visual inspection device is facilitated. SOLUTION: This data processor receives defect inspection information including at least coordinates of a plurality of defects transmitted from the visual inspection device for extracting the defects of a sample via a communication circuit, and defect review information including at least feature quantities transmitted from a review device for acquiring the image of the defects and imparting the feature quantities of the defect to it via a communication circuit, and displays a graph region whose axes expressing at least two among the feature quantities, and the defects are displayed at the positions according to the imparted feature quantities in the graph region. COPYRIGHT: (C)2008,JPO&INPIT