发明名称 POLISHING PAD
摘要 The objective of the present invention is to provide a polishing pad which is easy to produce and with which, when mounting the polishing pad to a polishing plate, a release film on an adhesive layer surface provided on the polishing pad can easily be released. This polishing pad is characterized by having at least a polishing layer, an adhesive layer for affixation to a polishing plate, and a release film provided on the adhesive layer surface, wherein a tag member is provided between the adhesive layer and the release film such that one end of said tag member is exposed.
申请公布号 WO2016098501(A1) 申请公布日期 2016.06.23
申请号 WO2015JP82006 申请日期 2015.11.13
申请人 ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. 发明人 NAKAMURA, KENJI
分类号 B24B37/22;C08G18/00;C08G101/00;H01L21/304 主分类号 B24B37/22
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