APPARATUS FOR REFINING PROCESS GAS FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for refining a process gas for manufacturing a semiconductor device capable of is provided. CONSTITUTION: The apparatus for measuring inside diameter of clamp ring in a semiconductor manufacturing equipment, the apparatus comprising: a base plate(1), a clamp ring(2) is mounted therein; a rotating plate(3) rotatably supported on the base plate(1); a gauge(5) installed at the rotating plate(3), and being rotated along the inside diameter of the clamp ring(2) measuring a displacement of a contacting portion which contacts with the inside diameter face of the clamp ring(2); a contacting portion forward and back means installed to the rotating plate(3) and forwarding and backing the contacting portion so that the contacting portion is selectively contacted with the inside diameter face of the clamp ring(2).