发明名称 |
WORKPIECE MACHINING DEVICE |
摘要 |
Provided is a workpiece machining device that has: a center drum that can rotate around a rotation shaft and has at least one first groove formed in the shaft direction in the outer peripheral surface; a carrier that has a holding hole into which a workpiece to be machined is inserted and held; an upper surface plate and a lower surface plate that can rotate around the rotation shaft in a state in which the carrier holding the workpiece is interposed between the upper surface plate and the lower surface plate; and at least one hook that is attached to the inner peripheral part of the upper surface plate and can move a tip part inserted into a first groove along the first groove. The center drum has at least one second groove formed in the shaft direction in the outer peripheral surface. The second groove has a different length than the first groove, and has a support surface that supports the hook from below at a position at which the upper surface plate is above the position at which the workpiece is machined. As a result, when the upper surface plate is stopped at a position that is above the position at which the workpiece is machined, the upper surface plate can be maintained at horizontal even when a force in the vertical direction acts on a grinding surface of the upper surface plate. |
申请公布号 |
WO2016199333(A1) |
申请公布日期 |
2016.12.15 |
申请号 |
WO2016JP01740 |
申请日期 |
2016.03.25 |
申请人 |
SHIN-ETSU HANDOTAI CO.,LTD. |
发明人 |
YASUDA, Taichi;SASAKI, Masanao |
分类号 |
B24B37/08;B24B37/28;H01L21/304 |
主分类号 |
B24B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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