| 摘要 |
<p>A microelectronic mechanical system (MEMS) switch includes a vane (122) formed over a substrate for electrically coupling an input line (102) to an output line (104) formed on the substrate. The vane includes flexible hinges (126), which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down (112) and pull-back (110) electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.</p> |
