发明名称 PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY
摘要 Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.
申请公布号 US2016238554(A1) 申请公布日期 2016.08.18
申请号 US201615049404 申请日期 2016.02.22
申请人 The Government of the United States of America, as represented by the Secretary of the Navy 发明人 In Hyun Jin;Field Christopher;Pehrsson Pehr E.
分类号 G01N27/414;H01L29/45;H01L29/06 主分类号 G01N27/414
代理机构 代理人
主权项 1. A structure comprising; a support; a plurality of nanowires perpendicular to the support; and an electrode in contact with a first end of each nanowire; wherein each nanowire has a second end in contact with the support; andwherein the electrode contains a plurality of perforations.
地址 Arlington VA US