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发明名称
THIN FILM FORMING METHOD, AND SEMICONDUCTOR LIGHT EMITTING DEVICE MANUFACTURING METHOD
摘要
申请公布号
KR20010033731(A)
申请公布日期
2001.04.25
申请号
KR1020007007254
申请日期
2000.06.29
申请人
发明人
分类号
H01L21/318
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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