Maintenance system, substrate processing apparatus, combination of remote operation unit and sensor, and communication method

摘要

An object of the present invention is to maintain a coating and developing system by remotely operating it more safely.
The present invention is a maintenance system (1) of a substrate processing apparatus, including a remote operation unit (5) for operating the substrate processing apparatus (M1-Mn) from a remote place by transmitting a remote operation information to a side of the substrate processing apparatus through a communication network (6) and providing the remote operation information to the substrate processing apparatus, and a communication control unit (3) for receiving the remote operation information transmitted to the side of the substrate processing apparatus (M1-Mn) and providing the remote operation information to the substrate processing apparatus. The communication control unit provides the remote operation information to the substrate processing apparatus only when there is an allow setting for the remote operation by a worker in the side of the substrate processing apparatus.