| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element that can be inexpensively and easily manufactured and can suppress decrease in sensitivity.SOLUTION: The vibration element includes a base part, and a drive arm 5 and a detection arm 6 extending from the base part. The detection arm 6 has an upper face 61, a lower face 62, and side faces 63, 64, in which first and second stepped portions 65, 66 are formed between the side face 64 and the upper and lower faces 61, 62. A first grounded detection electrode 81 is formed on the side face 63; a second detection electrode 82 is formed on a first step side face 651 of the first stepped portion 65; and a third detection electrode 83 is formed on a second step side face 661 of the second stepped portion 66.SELECTED DRAWING: Figure 3 |
